Hits:

Indexed by:期刊论文

Date of Publication:2017-03-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI

Volume:26

Issue:3

ISSN No.:1674-1056

Key Words:gas heating; pulse-modulated rf discharge; atmospheric pressure glow discharge

Abstract:The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature (T-g) in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that T-g decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the T-g, were studied. It was found that T-g decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the T-g can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from a to g mode in the pulse-modulated rf discharge was investigated, the spatial distributions of T-g in the two modes show different features and the ion Joule heating is more important during the mode transition.