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Indexed by:期刊论文

Date of Publication:2012-05-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI、ISTIC、Scopus

Volume:21

Issue:5

ISSN No.:1674-1056

Key Words:hydrogen discharge; particle-in-cell simulation; negative hydrogen ion

Abstract:Hydrogen discharges driven by the combined radio-frequency (rf)/short pulse sources are investigated using the particle-in-cell method. The simulation results show that the discharge driven additionally by the short pulse can enhance the electron density and modulate the electron energy to provide a better condition for negative hydrogen ion production than the discharge driven by the rf-only source.