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Indexed by:期刊论文

Date of Publication:2008-06-01

Journal:PHYSICS OF PLASMAS

Included Journals:SCIE、EI

Volume:15

Issue:6

ISSN No.:1070-664X

Abstract:Atmospheric pressure discharge nonequilibrium plasmas have been applied to plasma processing with modern technology. Simulations of discharge in pure Ar and pure He gases at one atmospheric pressure by a high voltage trapezoidal nanosecond pulse have been performed using a one-dimensional particle-in-cell Monte Carlo collision (PIC-MCC ) model coupled with a renormalization and weighting procedure (mapping algorithm ). Numerical results show that the characteristics of discharge in both inert gases are very similar. There exist the effects of local reverse field and double-peak distributions of charged particles' density. The electron and ion energy distribution functions are also observed, and the discharge is concluded in the view of ionization avalanche in number. Furthermore, the independence of total current density is a function of time, but not of position. (c) 2008 American Institute of Physics.