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超薄熔石英玻璃的CO_2激光热熔焊接工艺

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Date of Publication:2012-01-01

Journal:中国激光

Volume:39

Issue:10

Page Number:1003004

ISSN No.:0258-7025

Abstract:The study on the heating fusion welding between the ultra-thin fused
   silica glass with 25 mum-thickness and the end face of the fused silica
   capillary tube is carried by using low power CO_2 pulse laser with a
   pulse frequency of 40 kHz.The duty ratio,the defocus laser preheating
   and the defocus laser annealing impacting on the heating fusion welding
   of the fused silica glass are researched and analyzed.The results show
   that a duty ratio of 37% can perform perfectly the no
   penetration,sealing and firm welding between the ultra-thin fused silica
   glass and the fused silica capillary tube.For the welding without crack
   or split of the ultra-thin fused silica glass,the preheating of the +2
   mm defocus pulse laser with a duty ratio of 20% plays a key role.The
   annealing of the-2 mm defocus pulse laser with an appropriate duty ratio
   can release the residual thermal stress produced in the process of the
   heating fusion welding in the ultra-thin fused silica glass,enhancing
   the performance of the fused silica device.The pressure and temperature
   linearity of the fiber-optic Fabry-Perot sensor welded perfectly by the
   CO_2 laser are 0.9995 and 0.9991,respectively,and their repeatabilities
   are good.

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