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Date of Publication:2009-01-01

Journal:光学精密工程

Affiliation of Author(s):光电工程与仪器科学学院

Issue:12

Page Number:2887-2892

ISSN No.:1004-924X

Abstract:In order to meet the requirements of both industry and biomedicine for miniature pressure sensors,the miniature fiber optic pressure sensors based on Fabry-Perot (F-P) interferometric principle are manufactured. A piece of hollow fiber with a 175 μm outer diameter is fused directly onto a fiber tip and a thin diaphragm is fused onto the other end of the hollow fiber, then the F-P cavity is formed between the fiber tip and the diaphragm. An miniature entire quartz fiber optic pressure sensor is fabricated by cleaving, fused splicing and etching. The pressure response of the sensor is tested, test results show that the cavity pressure sensitivity is 41.09 nm/MPa in the full pressure scale of 0-3.1 MPa,and the pressure resolution is 681 Pa. The temperature sensitivity of the sensor has also been tested under atmospheric pressure, and a weak temperature dependence of 1.07 kPa/℃ is obtained in the test temperature from 20 ℃ to 140 ℃. Since it is hard to further decrease the thickness of the quartzose diaphragm,a polymer(PSQ) diaphragm is used as a pressure diaphragm to increase the sensitivity of the sensor. The pressure response of the PSQ diaphragm based sensor has also been tested under room temperature, it shows the cavity pressure sensitivity is 1 886.85 nm/MPa in the full pressure scale of 0.1-2.1 MPa, and the pressure resolution is 53 Pa.These results are very closed to the resolution of the pressure measurement in human being and animals.

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