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论文类型：会议论文

发表时间：2017-01-01

收录刊物：CPCI-S

卷号：10618

关键字：Parylene-C; Fabry-Perot; acoustic sensor; trace gas detection; photoacoustic spectroscopy

摘要：We demonstrate a high-sensitivity fiber-optic Fabry-Perot acoustic sensor based on a thin Parylene-C diaphragm. The vacuum thermal evaporation deposition method is used to fabricate the Parylene-C nanofilm, which possesses strong adhesion and good compactness. Based on these characteristics, the Parylene-C diaphragm is fabricated with 9 mm in diameter and 500 nm in thickness. The noise limited equivalent acoustic signal level is 33.5 mu Pa/Hz(1/2) at the frequency of 30 Hz. The pressure sensitivities of the acoustic sensor are more than 1000 mV/Pa at the frequency from 10 Hz to 30 Hz. The fundamental resonance frequency of the Parylene-C diaphragm is about 13 Hz. The acoustic sensor is applied in a multiple trace gas detection system based on photoacoustic spectroscopy. The detection limits of acetylene (C2H2), carbon monoxide (CO) and carbon dioxide (CO2) are achieved to be 0.25, 0.32 and 1.1 parts-per-million, respectively.