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基于光机械多探针原理的广域薄膜表面形貌测量方法研究

Release Time:2017-03-23  Hits:

Leading Scientist: 刘淑杰

Institution: 大连理工大学

Project Participants: 张元良

Project Source: 国家自然科学基金项目

Project Level: National level

Status: 已结题

Supported by: National Natural Science Foundation of China

Project Approval Number: 51205043

Date of Project Approval: 2019-03-25

Scheduled Completion Time: 2019-03-25

Date of Project Initiation: 2013-01-01

Date of Project Completion: 2015-12-31

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