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论文类型：会议论文

发表时间：2010-01-01

收录刊物：CPCI-S

页面范围：172-174

关键字：Feedforward controlling model; Axial asymmetric optical surface; Piezoceramic tools

摘要：To eliminate the hysteresis error of piezoceramic servo-tools during axial asymmetric optical surface machining, three feedforward controlling mathematical models were established. These methods include voltage increasing models, the peak voltage dropping models and arbitrary point voltage dropping models. Based on these models, a series of feedforward controlling compensation experiments show that the maximal displacement error is 0.04 mu m. This result indicates that, by employing the feedforward controlling mathematical models, the displacement error compensation could greatly reduce the hysteresis error in machining.