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大尺寸硅片的激光清洗机理及其数字化关键技术

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Leading Scientist:wangxuyue

Supported by:省、市、自治区科技项目

Status:结题

Supported by:辽宁省科学技术厅

Nature of Project:纵向

Project Approval Number:20062181

Date of Project Approval:2006-01-01

Scheduled completion time:2008-12-31

Date of Project Initiation:2007-01-01

Date of Project Completion:2023-09-13

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