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论文类型：期刊论文

发表时间：2013-08-15

发表刊物：8th Asian-European International Conference on Plasma Surface Engineering (AEPSE)

收录刊物：SCIE、EI、CPCI-S、Scopus

卷号：228

期号：SUPPL.1

页面范围：S601-S606

ISSN号：0257-8972

关键字：Modulated pulsed power (MPP) magnetron sputtering; High power pulsed magnetron sputtering (HPPMS); Multilayer coating; CrN/AlN coating; Superlattice; CrAlN

摘要：Thick and dense CrN/AlN superlattice coatings (up to 10 mu m) have been deposited by a hybrid magnetron sputtering process from metallic Cr and Al targets, which were powered by modulated pulsed power (MPP) magnetron sputtering and middle frequency pulsed dc magnetron sputtering (PMS) techniques, respectively. The bilayer period (Lambda) of the coatings was changed from 10 to 2.5 nm by varying the ratio of the N-2 flow rate to the total gas flow rate. The microstructure and properties of the CrN/AlN coatings were characterized using electron probe microanalysis, X-ray diffraction, scanning electron microscopy, transmission electron microscopy, scratch test, nanoindentation, and ball-on-disk wear test. The oxidation behavior of the thick CrN/AlN coating (Lambda = 2.8 nm) after annealing at 900 and 1000 degrees C in an ambient air has been investigated. Thick CrN/AlN coatings showed good adhesion. Superhardness values of 40-45 GPa and low wear rates in the low end of the 10(-8) mm(3) N-1 m(-1) range have been achieved in the coatings with A in a small range of 2.5 to 3.2 nm. No oxides were identified in the coatings after annealing at 1000 degrees C. The coating maintained cubic structure after annealing at 1000 degrees C. Published by Elsevier B.V.