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论文类型：会议论文

发表时间：2009-01-01

收录刊物：CPCI-S、SCIE

页面范围：567-571

关键字：Fe/Ti nanometer-scale multilayers; Hydrogen; Annealing; XRD; SIMS; TEM

摘要：Hydrogen transport in the Fe/Ti nanometer-scale multilayers on Si(100) substrate during in-situ annealing at 463 K was investigated by using x-ray diffraction (XRD), secondary ion mass spectrometry (SIMS), and cross-sectional transmission electron microcopy (XTEM). The Fe/Ti nanometer-scale multilayers constructed with thickness of alternating Fe and Ti sublayers of 16.2 nm and the sublayer thickness ratio of 1: 1 were deposited by direct current magnetron sputtering. The composition modulation structure was still maintained in Fe/Ti nanometer-scale multilayers during hydrogen annealing. After hydrogen annealing for 10 min, hydrogen permeated through the whole Fe/Ti nanometer-scale multilayers and localized at tetrahedral interstitial sites of Ti to form TiH. With the annealing time increased to 30 min, the concentration of hydrogen increased in the Ti sublayer and TiH transformed to TiH(2). It is found that composition modulation structure have an apparent effect on the hydrogen transport during annealing.