雷明凯

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:材料科学与工程学院

电子邮箱:mklei@dlut.edu.cn

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MODULATED EPITAXIAL GROWTH OF Fe/Cu NANOMETER-SCALE MULTILAYERS ON Si SUBSTRATES DEPOSITED BY MAGNETRON SPUTTERING

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论文类型:会议论文

发表时间:2009-02-15

收录刊物:EI、CPCI-S、SCIE、Scopus

卷号:1

页面范围:581-586

关键字:Fe/Cu nanometer-scale multilayers; Phase transformation; Metastability; XRD; TEM

摘要:Fe/Cu nanometer-scale multilayers of nominal modulation wavelength of 5.0 and 20.0 nm were deposited by magnetron sputtering on Si (100) substrates. Microstructure and morphology of the multilayers; were examined by small/wide angle x-ray diffraction (SA/WAXRD) and cross-sectional transmission electron microscopy (XTEM), respectively. The Fe(110) and Cu(111) textures formed in the multilayers with the modulation wavelength of 5.6 nm. The sharp interfaces in the epitaxial multilayers were obtained with no mixing phase at the interfaces. The metastable f.c.c.-Fe and b.c.c.-Cu phases under the duplex modulation wavelength in composition and structure coexisted in the multilayers due to an alternatively growth by order of b.c.c.-Fe/f.c.c.-Cu/f.c.c.-Fe/b.c.c.-Cu. A critical point in the phase stability diagram of Fe/Cu multilayers as a function of modulation wavelength and atomic volume fraction was found to predict the phase states of Fe/Cu multilayers.