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论文类型：期刊论文

发表时间：2015-08-25

发表刊物：SURFACE & COATINGS TECHNOLOGY

收录刊物：SCIE、EI

卷号：276

页面范围：152-159

ISSN号：0257-8972

关键字：CrN/TiN multilayer coatings; Pulsed dc magnetron sputtering (PDCMS); Mechanical properties; Tribological properties

摘要：CrN/TiN multilayer coatings were deposited by pulsed dc magnetron sputtering (PDCMS) in a closed field unbalanced magnetron sputtering system. The Ti target power was maintained at 2000 W while the Cr target power was varied from 70 to 1000 W. As the Cr target power was increased, CrN/TiN multilayer coatings with the Cr/(Cr + Ti) ratio of 0.037-0.573 had a single phase face-centered cubic structure with a texture evolution from (111) to (220). The residual stress of the coatings increased from -1.03 GPa to -5.65 GPa. The hardness and the H/E* and H-3/E*(2) ratios of the coatings exhibited an initial increase with the increasing Cr target power, then followed by a decrease. The coating with a Cr/(Cr + Ti) ratio of 030 reached the highest hardness and the H/E* and H-3/E*(2) ratios of 31 GPa, 0.0832 and 0.214, respectively. The coating also showed a dominant oxidative wear with the lowest friction coefficient and specific wear rate of 0.41 and 2.3 x 10(-6) mm(3) N-1 m(-1), respectively. The increase in the H/E* and H-3/E*(2) ratios led to the increase in the toughness and cohesion/adhesion strength of the coatings with the increased HF levels and critical loads (L-C1, L-C2 and L-C3). However, the coatings with similar H/E* and H-3/E*(2) ratios exhibited different tribological properties due to the different critical loads L-C3 resulted from the increased compressive residual stress. The improvements in toughness and cohesion/adhesion strength promoted the reduction in the crack initiation and propagation, and oxidative wear during dry sliding tests. (C) 2015 Elsevier B.V. All rights reserved.