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Date of Publication:2022-10-09

Journal:真空科学与技术学报

Affiliation of Author(s):化工学院

Issue:5

Page Number:397-403

ISSN No.:1672-7126

Abstract:Diamond-like carbon (DLC) films were grown on copper substrate coated with an intermediate layer by magnetron sputtering physical vapor deposition (MS-PVD) and by microwave electron cyclotron resonance (MW-ECR) plasma enhanced chemical vapor deposition (PECVD). Raman spectroscopy result indicates that the films show an amorphous structure and typical characteristics of DLC films. The morphology of DLC was characterized by atomic force microscopy (AFM) and the hardness and modulus were analyzed by nanoindentation. The difference of DLC films deposited on copper substrate with Ti/TiC and Si/SixNy intermediate layers was discussed.

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