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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：化工学院
学科：化学工程. 水科学与技术
办公地点：西部校区化工综合楼A503
联系方式：gchliu@dlut.edu.cn
电子邮箱：gchliu@dlut.edu.cn
通过制备Ti/TiC和Si/SixNy过渡层在铜基体上沉积类金刚石膜的研究
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发表时间：2022-10-09
发表刊物：真空科学与技术学报
所属单位：化工学院
期号：5
页面范围：397-403
ISSN号：1672-7126
摘要：Diamond-like carbon (DLC) films were grown on copper substrate coated with an intermediate layer by magnetron sputtering physical vapor deposition (MS-PVD) and by microwave electron cyclotron resonance (MW-ECR) plasma enhanced chemical vapor deposition (PECVD). Raman spectroscopy result indicates that the films show an amorphous structure and typical characteristics of DLC films. The morphology of DLC was characterized by atomic force microscopy (AFM) and the hardness and modulus were analyzed by nanoindentation. The difference of DLC films deposited on copper substrate with Ti/TiC and Si/SixNy intermediate layers was discussed.
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