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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：化工学院
学科：化学工程. 水科学与技术
办公地点：西部校区化工综合楼A503
联系方式：gchliu@dlut.edu.cn
电子邮箱：gchliu@dlut.edu.cn
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Preparation and Thermal Characterization of Diamond-Like Carbon Films
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论文类型：期刊论文
发表时间：2009-07-01
发表刊物：CHINESE PHYSICS LETTERS
收录刊物：SCIE、ISTIC、Scopus
卷号：26
期号：7
ISSN号：0256-307X
摘要：Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.