Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2006-01-01

Included Journals: CPCI-S

Page Number: 240-+

Abstract: Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented.