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Indexed by:会议论文

Date of Publication:2006-01-01

Included Journals:CPCI-S

Page Number:240-+

Abstract:Based on the integrated circuit equipments, this paper respectively introduces the constitute and function of the automated wafer-handling system, the design and principle of the wafer-handling robot, wafer positioning system, and end-effector calibration system. This paper studies the up-down and rotation component, radial linear stretch component, end rotation component and the principle of work. The kinematics analysis of the linear mechanism of radial stretch component is presented.