IJi6Ka5Hgh560vNbv1SNdPLKZ5sYnMqxH9wgppbojmejTQapen9fxbEQC7Xx
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无氰脉冲电镀金-铜合金工艺的研究

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2018-01-01

Journal: 电镀与环保

Included Journals: CSCD

Volume: 38

Issue: 1

Page Number: 8-12

ISSN: 1000-4742

Key Words: 无氰脉冲电镀;表面形貌;沉积速率;工艺参数

Abstract: 研究了一种以亚硫酸钠-HEDP为主配位剂的无氰脉冲电镀金-铜合金工艺.通过单因素试验考察了镀层表面形貌和沉积速率,并得出电流密度、镀液pH值、镀液温度和搅拌速率的影响规律及一组优选电镀工艺参数:电流密度0.3 A/dm2,镀液pH值9.0,镀液温度60℃,搅拌速率1 000 r/min.另外,评价了镀层和镀液的各方面性能.结果表明:镀层仅含金、铜元素;镀层表面细致均匀,孔隙率低,平整性好,无裂纹;镀层硬度高,结合力好,耐蚀性强;电流效率高,镀液稳定性好.

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