Current position: Home >> Scientific Research >> Paper Publications

Simulation of CMP Process Based on Mixed Elastohydrodynamic Lubrication Model with

Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2012-01-01

Prev One:Development of ultra-precision grinder for 300mm wafers

Next One:Grinding performance evaluation of the developed chemo-mechanical grinding (CMG) tools for sapphire substrate
Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Browse on mobile