location: Current position: Home >> Scientific Research >> Paper Publications

Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal

Hits:

Indexed by:Journal Papers

Date of Publication:2015-11-01

Journal:SCIENCE CHINA-TECHNOLOGICAL SCIENCES

Included Journals:SCIE、EI、CSCD、Scopus

Volume:58

Issue:11

Page Number:1877-1883

ISSN No.:1674-7321

Key Words:potassium dihydrogen phosphate (KDP) crystal; micro water dissolution machining (MWDM) principle; ultra-precision machining; surface root-mean-square (rms) roughness

Abstract:In this paper, a micro water dissolution machining (MWDM) principle is proposed for machining potassium dihydrogen phosphate (KDP) crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. In addition, two instances of the application of this principle to ultra-precision machining of KDP crystals are presented. Computer-controlled optical surfacing (CCOS) and diamond wire cutting (DWC) process were carried out according to the MWDM principle. In the case of the CCOS technology, it is found that the micro-waviness was removed completely by following the MWDM principle. The surface undulation decreased from 40 nm to less than 10 nm, and the surface root-mean-square (rms) roughness obviously reduced from 8.147 to 2.660 nm. In the case of the DWC process, the surface rms roughness reduced from 8.012 to 2.391 mu m, and the cutting efficiency was improved. These results indicate that the MWDM principle can efficiently improve the machining quality of KDP optical crystal and has a great potential to machine water-soluble materials.

Pre One:A novel approach of high speed scratching on silicon wafers at nanoscale depths of cut

Next One:碳纤维/环氧树脂复合材料制孔损伤综合评价方法