Current position: Home >> Scientific Research >> Patents

一种化学机械抛光单晶氧化镁基片用的抛光液

Release Time:2019-03-09  Hits:

First Author: Renke Kang

Disigner of the Invention: Dong Zhigang,Dongming Guo,金洙吉,王科

Application Number: CN201010010121.6

Authorization Date: 2010-01-12

Authorization Number: CN101760138A

Prev One:用于硅片超精密磨床的压电式磨削力测量装置

Next One:可调式测力仪标定加载台的布局方法及装置