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用于硅片超精密磨床的压电式磨削力测量装置

Release Time:2019-03-09  Hits:

First Author: 钱敏

Disigner of the Invention: Dongming Guo,zhuxianglong,刘博,Renke Kang,张军

Authorization Date: 2010-06-02

Authorization Number: 200910220064.1

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