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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：复旦大学
学位：博士
所在单位：物理学院
学科：凝聚态物理
办公地点：大连理工大学三束材料改性重点实验室1号楼203房间
联系方式：qyzhang@dlut.edu.cn 0411-84707930 转 13
电子邮箱：qyzhang@dlut.edu.cn
Oxidation behavior of TiN/ZrN multilayers annealed in air
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论文类型：期刊论文
发表时间：2008-01-30
发表刊物：THIN SOLID FILMS
收录刊物：SCIE、EI
卷号：516
期号：6
页面范围：1025-1028
ISSN号：0040-6090
关键字：TiN/ZrN multilayers; oxidation behavior; layer-by-layer; interface
摘要：Using reactive radio frequency magnetron sputtering, TiN/ZrN multilayers were deposited on Si (111) substrates at 550 degrees C. The multilayers were annealed at different temperatures ranging from 500 to 1100 degrees C in air. The variation of the annealed multilayers has been investigated by X-ray diffraction and transmission electron microscopy. A layer-by-layer oxidation behavior is found in the multilayers annealed at temperatures below 900 degrees C. The oxidation mechanism of multilayers is discussed in the paper. (C) 2007 Elsevier B.V. All rights reserved.