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论文类型：期刊论文

发表时间：2009-04-15

发表刊物：JOURNAL OF APPLIED PHYSICS

收录刊物：SCIE、EI

卷号：105

期号：8

ISSN号：0021-8979

关键字：discharges (electric); plasma density; plasma instability; plasma simulation; plasma temperature

摘要：One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.