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跨尺度安保机构的MEMS工艺技术开发

Release Time:2021-03-29  Hits:

Leading Scientist: 杜立群

Project Participants: 宋满仓

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Nanjing University of Aeronautics and Astronautics

Nature of Project: 横向

Date of Project Approval: 2020-06-30

Scheduled Completion Time: 2021-06-30

Date of Project Initiation: 2020-06-30

Date of Project Completion: 2023-07-14

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