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基于水平集方法的三维等离子体刻蚀剖面演化规律研究

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Leading Scientist:daizhongling

Status:结题

Supported by:大连理工大学

Nature of Project:纵向

Project Approval Number:DUTSF200810

Date of Project Approval:2008-07-15

Scheduled completion time:2010-12-31

Date of Project Initiation:2009-01-01

Date of Project Completion:2010-12-31

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