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Paper Publications

[51]Jiang, Wei, Xu, Xiang, Dai, Zhong-Ling, Wang, You-Nian, W (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, State Key Lab Mat Modificat, Dalian 116024, Peoples R China..Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combin...[J],PHYSICS OF PLASMAS,2008,15(3)
[52]Dai Zhong-Ling, Liu Chuan-Sheng, Wang You-Nian, Dai, ZL (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, State Key Lab Mat Modificat, Dalian 116024, Peoples R China..Comparison between dual radio frequency- and pulse-driven sheath near insulating substrates[J],CHINESE PHYSICS LETTERS,2008,25(2):632-635
[53]戴忠玲, 王友年.The characteristics of a collisional dual frequency sheath over an electrode with a cylindrical h...[A],2008
[54]王帅, 王友年, 戴忠玲, 徐翔.双频电容耦合等离子体物理特性的一维流体力学/Monte-Carlo混合模拟[A],2007,15
[55]戴忠玲, 毛明, 王友年.等离子体刻蚀工艺的物理基础[J],物理,2006,35(8):693-698
[56]Wang Y.-N., Dai Z.-L..Simulations of Ion Transport in a Collisional Radio-Frequency Plasma Sheath[A],2003,185-
[57]戴忠玲, 王友年, 马腾才, Dai, ZL (reprint author), Dalian Univ Technol, Dept Phys, Dalian 116024, Peoples R China..射频等离子体鞘层动力学模型[J],物理学报,2001,50(12):2398-2402
[58]Dai Z.-L., Wang Y.-N., Ma T.-C.Teng-Cai, Dai, Z.-L., Department of Physics, Dalian University of Technology, Dalian 116024, China.Dynamical model of the radio-frequency plasma sheath[J],Wuli Xuebao/Acta Physica Sinica,2001,50(12):2402-

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