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面向IC装备设计的电磁场建模仿真工具

Release Time:2016-08-09  Hits:

Leading Scientist: 关振群

Project Source: 科技部重大专项

Status: 结题

Supported by: Tsinghua University

Nature of Project: 纵向

Project Approval Number: 2011ZX02403-004-2

Date of Project Approval: 2011-01-01

Scheduled Completion Time: 2014-12-30

Date of Project Initiation: 2011-01-01

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