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发表时间：2022-10-09

发表刊物：机械工程学报

所属单位：机械工程学院

期号：11

页面范围：61-67

ISSN号：0577-6686

摘要：The microactuator driven by new type functional material is one of key technologies of precision machining, ultraprecision machining and micro-machinery. The study of microactuator's drive element, structural design, precision control, machining and manufacturing and so on, has significance and use value. The outstanding properties of piezoelectric material, shape memory alloy and magnetostriction material, and the driving principle and design feature of microactuator are analyzed respectively. The development trend and key technologies of functional material driven microactuators are expounded.

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