On-machine noncontact scanning of high-gradient freeform surface using chromatic confocal probe on diamond turning machine
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发表时间：2022-10-07
发表刊物：OPTICS AND LASER TECHNOLOGY
卷号：134
ISSN号：0030-3992
关键字："On-machine scanning; Chromatic confocal probe; High-gradient freeform surface; Diamond turning machine"