location: Current position: Home >> Scientific Research >> Paper Publications

Fluid simulation of inductively coupled Ar/O-2 plasmas: Comparisons with experiment

Hits:

Indexed by:Journal Papers

Date of Publication:2015-09-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI、ISTIC、Scopus

Volume:24

Issue:9

ISSN No.:1674-1056

Key Words:fluid simulation; experimental measurement; Ar/O-2 inductive discharges

Abstract:In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O-2 radio frequency (RF) inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters (i.e., the RF power, the pressure, and the Ar/O-2 gas ratio) on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution. However, the pressure and the Ar/O-2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.

Pre One:Two-dimensional simulation of discharge channels in atmospheric-pressure single dielectric barrier discharges

Next One:Simulation study of one-dimensional self-organized pattern in an atmospheric-pressure dielectric barrier discharge