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论文类型：期刊论文

发表时间：2015-09-01

发表刊物：CHINESE PHYSICS B

收录刊物：SCIE、EI、ISTIC、Scopus

卷号：24

期号：9

ISSN号：1674-1056

关键字：fluid simulation; experimental measurement; Ar/O-2 inductive discharges

摘要：In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O-2 radio frequency (RF) inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters (i.e., the RF power, the pressure, and the Ar/O-2 gas ratio) on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution. However, the pressure and the Ar/O-2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.