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论文类型：期刊论文

发表时间：2008-02-01

发表刊物：JOURNAL OF RARE EARTHS

收录刊物：SCIE、EI、ISTIC

卷号：26

期号：1

页面范围：31-34

ISSN号：1002-0721

关键字：Yb-Er codoped nonuniform films; the medium frequency magnetron sputtering system; asymmetry targets; photoluminescence spectra; rare earths

摘要：The nonuniform Yb-Er Codoped Al2O3 films were prepared on SiO2/Si substrates using a medium frequency magnetron sputtering system. Two asymmetry targets in the system were introduced to realize the nonuniform dopant. Some curves of Photoluminescence (PL) peak intensity were obtained by adjusting the deposition parameters, such as, the pillar number of erbium and ytterbium in the mixed target and the distance between a sample table and targets. Typically, the curve of PL peak intensity against the offset distance was approximately linear. The ratio of the PL intensity at the two ends of the same sample was 12.6 and the slope was 71.83/mm when the pillar numbers of the erbium and ytterbium in the mixed target are 5 and 60, respectively, and the distance between targets and the sample table is 2.9 cm.