Current position: Home >> Scientific Research >> Patents

氧化锌生长用低压金属有机化学汽相沉积设备及其工艺

Hits:

First Author:duguotong

Disigner of the Invention:杨树人,王秋来,hulizhong

Application Number:CN200410011164.0

Authorization Date:2004-10-19

Authorization number:CN1644754

Pre One:一种p型ZnO薄膜的金属有机物化学气相沉积制备方法

Next One:一种Sb掺杂制备p型ZnO薄膜方法