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Experimental Study on the Dielectrostriction of SiO2 with a Micro-Fabricated Cantilever

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Indexed by:会议论文

Date of Publication:2009-10-25

Included Journals:EI、CPCI-S、Scopus

Page Number:1030-+

Abstract:The dielectrostriction effect of thermal SiO2 was experimentally studied in this paper. A beam bending method was used to apply mechanical stresses on the dielectric and the dielectric constant was characterized by the capacitance of a sandwich structure. A model for extracting the dielectrostriction coefficient, M-12, was developed and special samples for the measurements were fabricated. According to the measurements the dielectrostriction coefficient, M-12, of thermal SiO2 is -0.19 +/- 0.01x10(-21)m(2)/V-2.

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