Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2006-06-21

Included Journals: Scopus、CPCI-S、EI

Volume: 2

Page Number: 8407-+

Key Words: PZT thin film; microforce; microsensor; sol-gel; micro-cantilever

Abstract: PZT thin film sensors are widely used in microsensor because of its simple structure, high sensitivity and good linearity. The sol-gel method is used for the PZT thin film deposition on the silicon cantilever structure, actuation and sensing electrodes are made on the PZT micro-cantilever by the bulk micromachining technology. AC voltage is applied to the actuation electrode to make the micro-cantilever oscillate at 70Hz, and the charge on the sensing electrode serves as sensor signal. When contact force is applied to the tip of the micro-cantilever, the amplitude variation of the induced charge is collected by a charge amplifier and a digital lock-in amplifier. Experiments have shown that the PZT thin film sensors with the micro-cantilever structure are able to sense contact force whether the PZT thin film is in the state of stretching stress or compressive stress. The resolution of the microforce sensor is 3 mu N at the stretching stress, and 3.75 mu N at the compressive stress.