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基于1×2阵列压电悬臂梁的AFM并行扫描研究

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Date of Publication:2022-10-10

Journal:2010(第三届)中国微纳电子技术交流与学术研讨会论文集中国半导体行业协会;微纳电子技术杂志社

Page Number:75-75

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