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压电陶瓷执行器迟滞与非线性成因分析

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Date of Publication:2022-10-09

Journal:光学精密工程

Issue:3

Page Number:270-275

ISSN No.:1004-924X

Note:新增回溯数据

Pre One:压电送料器自感知送料速度控制研究

Next One:压电陶瓷管的微位移测量与非线性校正
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