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铁电薄膜电滞回线测量的快速数值补偿方法研究

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Date of Publication:2022-10-09

Journal:电子学报

Affiliation of Author(s):电子信息与电气工程学部

Issue:11

Page Number:2557-2560

ISSN No.:0372-2112

Abstract:The effect of leak resistance and linear capacitance must be compensated in the hysteresis measurement of ferroelectric film.This paper adopted improved Sawyer-Tower circuit and analyzed the influence to the spontaneous polarization introduced by leak resistance and linear capacitance.It was found that in sinusoidal electric field the leak resistance added an odd symmetrical voltage component to polarized voltage about the saturated polarization point, and linear capacitance brought in an even symmetrical voltage component. Two equations for calculating the leak resistance and linear capacitance were derived. Sample only three couples of the driving voltage and polarized voltage at the peak of saturated polarization and its adjacent left and right point, the value of leak resistance and linear capacitance can be determined immediately, and then followed by fast numerical compensation of hysteresis.Time for determining leak resistance and linear capacitance is 2% of that using dichotomy.

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