Preliminary study of calibration system for PZT thin film micro force sensor
Release Time:2022-11-13 Hits:
Date of Publication: 2022-10-08
Journal: FERROELECTRICS
Institution: 机械工程学院
Volume: 358
Issue: 1 PART 4
Page Number: 904-+
ISSN: 0015-0193
Release Time:2022-11-13 Hits:
Date of Publication: 2022-10-08
Journal: FERROELECTRICS
Institution: 机械工程学院
Volume: 358
Issue: 1 PART 4
Page Number: 904-+
ISSN: 0015-0193