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硅基PZT薄膜微型悬臂的特性及其在微型传感器执行器上的应用

Release Time:2022-11-13  Hits:

Date of Publication: 2022-10-06

Journal: 仪器仪表学报

Issue: z1

Page Number: 194-196

ISSN: 0254-3087

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