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NiC/NiSi薄膜热电偶传感器的研制及有限元模拟

Release Time:2019-03-10  Hits:

Indexed by: Journal Article

Date of Publication: 2008-09-15

Journal: 仪表技术与传感器

Included Journals: CSCD、ISTIC、PKU

Volume: 1

Issue: 9

Page Number: 15-17

ISSN: 1002-1841

Key Words: 薄膜热电偶;磁控溅射;瞬态切削温度;有限元

Abstract: 采用磁控溅射法,在刀具材料为w18Cr4V高速钢的后刀面上镀制了NjCr/Nisi薄膜热电偶.传感器既能满足切削要求,同时又能够快速采集温度信号,并对其进行了静态和动态标定,实验范围内线性误差为O.56%,时间常数为12.7 ms,响应迅速,满足实验要求.最后用ANSYS对传感器的瞬态响应和温度场分布进行了有限元仿真.并通过实验进行了验证.

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