location： Current position: Home >> Scientific Research >> Paper Publications

A Novel Piezoelectric Grinding Dynamometer for Monitoring Ultra-precision Grinding of Silicon Wafers

Hits:

Indexed by:会议论文

Date of Publication:2010-01-01

Volume:126

Page Number:707-712

Pre One:多维大力并联分载原理与传感器

Next One:Design, calibration and error analysis of a piezoelectric thrust dynamometer for small thrust liquid pulsed rocket engines
Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep