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一种用压电叠堆精密定位的方法和装置

Release Time:2019-03-09  Hits:

First Author: 孙宝元

Disigner of the Invention: 石银辉,周喜,张军,钱敏,张忠华

Application Number: CN200810010860.8

Authorization Date: 2008-03-27

Authorization Number: CN101252330

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