用于硅片超精密磨床的压电式磨削力测量装置
Release Time:2022-10-20 Hits:
First Author: 钱敏
Disigner of the Invention: 张军,Renke Kang,刘博,zhuxianglong,Dongming Guo
Institution: 机械工程学院
Application Number: CN101716747A
Authorization Number: CN200910220064.1
Release Time:2022-10-20 Hits:
First Author: 钱敏
Disigner of the Invention: 张军,Renke Kang,刘博,zhuxianglong,Dongming Guo
Institution: 机械工程学院
Application Number: CN101716747A
Authorization Number: CN200910220064.1