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一种β－碳化硅薄膜的制备方法

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Disigner of the Invention:Qin Fuwen,liuweifeng,liuyanhong,毕凯峰,张志坤,Jiming Bian

Affilication of Author(s):物理与光电工程学院

Authorization Date:2016-01-20

Pre One:一种β－碳化硅薄膜的制备方法
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