location： Current position: Home >> Scientific Research >> Paper Publications

离子束辅助沉积制备TaN薄膜的X射线衍射分析

Hits:

Date of Publication:1998-01-01

Journal:真空科学与技术

Affiliation of Author(s):物理学院

Issue:06

Page Number:405-408

ISSN No.:0253-9748

Note:新增回溯数据

Pre One:Ar12+离子辐照对金属玻璃和金属钨表面微观结构和性能的影响

Next One:离子束辅助沉积制备氮化钽薄膜
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep