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HIPIB烧蚀等离子体沉积DLC薄膜结构及性能

Release Time:2022-06-23  Hits:

Date of Publication: 2004-01-01

Journal: 大连理工大学学报

Institution: 物理学院

Issue: 4

Page Number: 469-473

ISSN: 1000-8608

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