Preparation, structure and properties of TaN and TaC films obtained by ion beam assisted deposition
Release Time:2025-11-26 Hits:
Date of Publication: 2022-10-08
Journal: NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B BEAM INTERACTIO
Institution: 物理学院
Volume: 127
Page Number: 664-668
ISSN: 0168-583X