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X-ray analysis of TaN film prepared by ion beam assisted deposition

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Date of Publication:2022-10-03

Journal:Jisuanji Jicheng Zhizao Xitong/Computer Integrated Manufacturing Systems, CIMS

Affiliation of Author(s):物理学院

Volume:4

Issue:5

Page Number:405-408

ISSN No.:1006-5911

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