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X-ray analysis of TaN film prepared by ion beam assisted deposition

Release Time:2025-11-26  Hits:

Date of Publication: 2022-10-03

Journal: Jisuanji Jicheng Zhizao Xitong/Computer Integrated Manufacturing Systems, CIMS

Institution: 物理学院

Volume: 4

Issue: 5

Page Number: 405-408

ISSN: 1006-5911

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